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Characterisation Tools
1. The Lossmeter
A 
NovaWave Technologies’ LossPro™ precision reflectometer and optical lossmeter operates at 3 wavelengths: 808, 1030 and 1550 nm. It enables high performance optical components to be accurately characterized with ultra high precision. The system utilizes the proven cavity ringdown technique to determine reflectance and losses in thin films and optical substrates with unparalleled precision. Reflectance from 98 % to 99.9995 % or total optical loss ranging from 2 % to 0.0005 % can be precisely and rapidly determined with sub-ppm-level precision using proprietary, high speed data acquisition and analysis software.
The lossmeter is located at the LMU Building, Am Coulombwall 1 (Garching).
Contact: Vladimir 
Pervak.
2. The Spectrometer
Spectrometer Perkin Elmer Lambda – 950. Spectral range 180-3300 nm; absolute accuracy of transmission measurements 0.1 %; maximal reflectivity which can be measured 99.9 %.
The spectrometer is located at the LMU Building, Am Coulombwall 1 (Garching)
Contact: Vladimir Pervak.
3. White-Light-Interferometry
White light interferometry (WLI), developed at LMU, allows to measure dispersion characteristics of mirrors. It is based on Michelson interferometer measuring the delay of different spectral components of the white spectrum in a tested mirror at different delays of one of the arms. WLI operates in a spectral range from 250 nm to 2.2 µm with the accuracy better than 10 fs2.
More details ...
For details: D. Grupe. Measuring group delay dispersion in the UV-VIS-IR range by white light interferometry. Diploma work 2008
The WLI is located at the LMU Building, Am Coulombwall 1 (Garching).
Contact: Vladimir Pervak.
4. Ellipsometry
Our ellipsometer M-2000 is from J.A. Woolam Co. and fixed to the IBD-O, but can also be used to measure samples. It is equipped with a white light Xe source (240-1700nm) and an appropriate detector.
In ellipsometry, a polarizer and an analyzer is used to measure the change in polarization by reflection of the sample. Numerical fits are then be used to
- get the optical constants in the measured range with a high accuracy and
- to measure the film thickness with Angstrom accuracy. This allows in- situ thickness control during deposition in the IBD-O.
The ellipsometer is located at the MPQ (Garching).
Contact: Michael Hofstetter
5. Surface Profilometer
Our lab is equipped with a Dektak 150 Stylus Profiler from Veeco. A cantilever scans the surface profile of a sample mechanically along one axis with few nm resolution. Measurement series allow 3-D surface profile picture and can be used as easy characterization tools to measure film thicknesses, stress and surface roughnesses over the surface up to 200 mm.
The profilometer is located at the LMU Building, Am Coulombwall 1 (Garching).
Contact: Vladimir Pervak.
6. Zygo Interferometer
150 mm aperture, operates at the wavelengths 532, 632, and 790 nm.
This interferometer is located at the MPQ (Garching).
Contact: Stefan Karsch